The Nikon NSR-1755i7A is an i-line wafer stepper used for high-throughput, mature semiconductor manufacturing, featuring a 0.55µm resolution and supporting wafers up to 200mm. It is commonly used for MEMS, power devices, and analog IC production, often utilizing a three-zone illumination source to optimize throughput and stability.
(on 8-inch wafers) and a depth of focus of
.