Key Features of the Nikon NSR-1755G7A:
- Precision Alignment: Equipped with a multi-function CCD for enhanced alignment precision and dual-sided detection.
- Performance: Features a 130mm projection lens with 650 nm resolution, suitable for fine-patterning operations.
- High Throughput: The system’s design allows for up to 345 wafers per hour.
- Optimal Environment: Includes a sub-ambient refrigeration unit for thermal stability.
- Flexibility: Provides multi-field shot options and supports advanced substrates.