TEL ACT12 Closed Loop System
Infineon Tool Name: LITV52-01 (BE12CL05)
Infineon Inventory Number: 234085
Overview
TEL Type Number: MD-E210305
Configuration
Main Unit:
o 300mm – 12inch wafer setup
o Type 4 Main controller
o Dispense Monitoring system on all 24 resist lines
o Auto air vent function on all resist LE tanks
o 4 FOUP load ports for 12” wafers
o 2 COT units
o 2 BARC units
o 4 DEV units
o WEE unit
o Closed Loop T&H System
o IFB for wafer transport system NIKON NSR-S204B
o Several Software Options
Chemical Cabinet 1
Chemical Cabinet 2
Chemical Cabinet 3
AC Power Box
Temp. Cont. Unit
System T&H 1 with filter system
System T&H 2 with filter system
General:
CE Marking
