Advanced PECVD System for Thin Film Deposition & Etch Applications
Key Features
Oxford Instruments Plasmalab System 100
Comdel LF Generator Upgrade-First Solar part number 94-219969U1
Pc2003 RF Generator Interface Architecture
Multiple RF Channels for Independent Process Control
Integrated Power Distribution & Matching Network
Reliable Oxford Instruments Technology Built for Demanding Environments
Used- Excellent, Pulled from operational environment
