System ClassificationModular UHV thin-film deposition platform (MBE / PVD hybrid research system).
Core ArchitectureMulti-port radial UHV chamber with ConFlat (CF) flanges enabling integration of multiple sources,diagnostics, and transfer components.
Vacuum SystemHigh-vacuum / ultra-high vacuum capable system using turbomolecular pumping (Pfeiffer HiPaceseries), supported by a backing pump. Designed for pressures in the 10■■Torr range.
Functional Capabilities- Thin film deposition (sputtering / evaporation / possible MBE configuration) – Surface scienceexperimentation – Process gas introduction and control – In-situ gas analysis via RGA – Multi-sourcedeposition flexibility
Typical Applications- Semiconductor R&D; – Materials science and thin film research – Coatings development – Surfacephysics experiments
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