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Used Applied Materials (Amat) CENTURA 5200 EPI reduce pressure system

Used Applied Materials (Amat) CENTURA 5200 EPI reduce pressure system

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Used Applied Materials (Amat) CENTURA 5200 EPI reduce pressure system

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Used Applied Materials (Amat) CENTURA 5200 EPI reduce pressure system

3 chamber system 200mm

Description

Wafer Size: 200mm

Nickle system: Yes

Toxic gas box: Yes

SSR Available: No

Voltage: 208 Volts

Flash Memory Dr: Yes

Processor: 68040

Load Locks: WB

ENP: Yes

Robot: HP

Heat Exchanger: Steel Head

Chamber A: RP Epi

Chamber B: Rp Epi

Chamber C: RP Epi