| Category | Items | Uozu configuration (412734) |
| A. General Information | Manufacturer | Applied Material inc. |
| Model | DPS PLUS POLY | |
| Technology | Poly Etch | |
| Platform Type | ETCH CENTURA II | |
| Application | Poly Etch | |
| Software | Unknown? E4.9_15? |
|
| Wafer Size | 150mm(JMF) | |
| B. Mainframe Configuration | Position A | DPS PLUS POLY |
| Position B | DPS PLUS POLY | |
| Position C | – | |
| Position D | – | |
| Position E | – | |
| Position F | Orienter | |
| Front Panel | Anti-Static Painted | |
| Signal Light Tower | 3 Color(R,A,G) | |
| C. Electrical Requirements | Line Voltage | 200/208 VAC |
| Line Frequency | 60 Hz | |
| GFI | 100mA | |
| AC Rack Types | Centura II 66inch Common | |
| D. System Safety Equipment | EMO Switch Type | Press To Activate, Turn To Release EMO |
| EMO Guard Ring | Included | |
| E. Mainframe | Chamber Wall Flow Sensor | Yes |
| Chamber Cathode Flow Sensor | Yes | |
| Chamber Turbo Pump Flow Sensor | Yes | |
| DPS Ch Dome Flow Sensor | Yes | |
| Loadlock Type | Wide Body | |
| Cassette Type Supported | Unknown | |
| Loadlock Slit Valve | O-ring type(Viton) | |
| Wafer Mapping | Enhanced(fast) | |
| Robot Type | HP+ | |
| Robot Blade Option | Aluminium | |
| Wafer On Blade Detector | Basic | |
| Loadlock Vent Filter | Ceramic | |
| Loadlock Heater | Install | |
| Loadlock Vent | Top Vent | |
| F. Orienter Chamber | Hoop Type | STD |
| G. Etch Chamber(DPS_R1) | DTCU | ES DTCU |
| Voltage Distributor Electrode | YES | |
| Mount Ring | unknown | |
| Lower chamber cover | STD | |
| Lifter pin ass’y | Lip seal type(0010-39650) | |
| TMP | EDWARDS | |
| Pressure Gauge | CM100mt(MKS) | |
| Pressure Gauge | CM10torr(MKS) | |
| ESC HV MODULE | 0010-30139 | |
| BIAS RF Matcher | 0010-00854 | |
| Source RF Matcher | Install | |
| HE Pressure Controller | MKS649A Type(50sccm) | |
| Source RF Generator | Atlas2012 | |
| BIAS RF Generator | ACG-6B | |
| Throttle Valve | Throttling Gate Valve(TGV) | |
| Electrostatic chuck type | unknown | |
| ETCH Pump Pipe Line(With heater) | for Edwards TMP | |
| Cathode Ass’y | Single HE supply type | |
| Upper Chamber | Full A-Coat | |
| Ceramic dome | 0200-39137 | |
| Single Ring | ||
| H. GAS Pannel | MFC Type | AERA FC-D980C |
| ETCH_GAS1,11 | CL2_200sccm | |
| ETCH_GAS2,12 | HBR_200sccm | |
| ETCH_GAS3,13 | – | |
| ETCH_GAS5,15 | – | |
| ETCH_GAS6,16 | CF4_200sccm | |
| ETCH_GAS7,17 | CHF3_100sccm | |
| ETCH_GAS8,18 | O2_100sccm | |
| ETCH_GAS9,19 | SF6_100sccm | |
| ETCH_GAS10,20 | AR_200sccm | |
| Gas panel facilities hook up | BD Side SLD Box Bottom Feed | |
| Gas panel exhaust | AC chamber TOP Side | |
| Gas panel controller | VMEⅡ | |
| Valve | Veriflo | |
| Transducer | MKS 872 | |
| Regulator | same | |
| Filter | Milipore | |
| Transducer Displays | same | |
| I. System Configuration | Endpoint Monitor | CRT |
| Endpoint Position | Rack Mount | |
| Endpoint Type | same | |
| Controller Type | same | |
| Umbilicles | 40 Feet Base | |
| Controller to Mainframe Umbilical | 40ft | |
| AC To Mainframe Umbilical | 40ft | |
| Chiller Control Cable Length | 40ft | |
| Chiller Hose Length | 50ft | |
| Pump Signal Cable Length | 50ft | |
| RF RACK to MF Cable Length | 75ft | |
| Chiller type | SMC H2000 | |
| CATHODE(CH-A & B) | H2000(SMC) | |
| WALL(CH-A & B) | H2000(SMC) | |
| DOME(CH-A & B) | Facility Cooling Water | |
| Coolant Type | DI+EG | |
| Chiller power line | 2ea(Tool C/B <–> Chiller) | |
| chiller hose | Hose type_4ea(50Ft) | |
| chiller signal line | Signal I/O | |
| Pump Configurations | EBARA AA40W/AA10 | |
| Pump Interface Qty | 4ea | |
| Pump power line | 4ea(Tool C/B <–> Pump) | |
| M/F Utility connection | Rear side | |
| J. ETC | UPS | NONE |
| LAMP CB | 20A | |
| RF GENERATOR CB | (B)15A/(S)30A | |
| PUMP CB | 30A | |
| System Monitor | 1ea CRT(Stand Alone) | |
| Dtcu Hoist | single type |
