The Nikon NSR-2005i8A is a widely used, high-productivity 5x reduction i-line stepper designed for 8-inch (200mm) wafer manufacturing. Using a
Hg lamp, it offers
resolution, ideal for legacy, MEMS, and power semiconductor applications. It is known for reliability, featuring advanced autofocus and robust alignment for, respectively, high-volume production.
(i-line) mercury lamp.
