Laurell WS-650Hz-23NPPB Spin Coater

Overview

•Laurell WS-650Hz-23NPPB programmable spin coater / processor

•Accommodates up to ø150mm (6″) wafers and 5″ × 5″ (127mm × 127mm) substrates

•Maximum rotational speed: 12,000 RPM (substrate-dependent)

•650-series microprocessor controller with real-time operator interaction

•Compatible with Laurell Spin 3000 PC software — remote operation, process recording, LAN/Internet connectivity

•Compact benchtop form factor — universal power input: 95–240 VAC, 47/63 Hz, ~300WKey Features

•Chemically resistant NPP co-polymer housing — solvent, acid, and base resistant

•Proprietary labyrinth seal — sub-micron particle-free motor and electronics protection

•Closed bowl design eliminates splash-back; internal gutter channels fluid away from substrate

•Process safeguard prevents accidental re-processing of substrates

•Field-upgradeable with plug-in modules — no factory return required; unlimited programmable processes and steps

•Nitrogen purge capability for process chamber; CE, RoHS, ETL certified; UL/CSA approved components

•Bluetooth-equipped model (NPPB designation)

Applications

•Photoresist spin coating

•Sol-gel and polymer thin film deposition

•Wafer cleaning, etching, and developing

•MEMS fabrication and semiconductor R&D;

•Academic and industrial cleanroom use

Included Items

•Laurell WS-650Hz-23NPPB spin coater unit with process controller

•Original factory packaging, documentation, and accessories

•Standard vacuum chuck and fragment adapter