Directinject Steam Generator System

System provides ultrapure steam to any diffusion furnace atmospheric or vacuum easily and continually without any direct support at a fraction of the cost of any other steam generating system.

The DirectInject™ Steamer can easily and quickly replace present steam generating systems and only requires DI water in very minute quantity to generate up to 50L per minute of ultrapure steam. The DirectInject™ is very small compared to other systems on the market with the steam reaction chamber connecting directly to the gas input port at the back of the process chamber, this eliminates long quartz hookup tubing that requires heater tape. The control/distribution box easily fits on any furnace shelf and can be facilitated and operational in less that one day and does not require shutting down any part of the furnace bank.

The DirectInject™ Steam Generator System completely eliminates bubblers, auto-fill systems and highly flammable, explosive and very expensive hydrogen systems.

The DI water used to generate steam is contained in RO approved plastic components. The filter system includes a 3.0 micron DI water filter that removes particles and heavy metal contaminates and a pressure regulator