Leybold Optics SyrusPro 1510 Double APS Evaporator System
Key benefits:
– Far IR to deep UV wavelength spectrum
– Co-evaporation from two sources, with
dual-rate and thickness control
– Leybold Optics LION and APSpro ion
sources
– Integrated proprietary optical monitoring
system
– Outstanding versatility through variety
of options
– Eight different chamber sizes
(700 up to 2800 mm)
– Substrates up to 1.1 m in size
– Fully modular and customizable concept
– Benchmark in cost-per-piece
Call for more information
