Nikon NSR-S204B 248nm Scanner Exposure System
Infineon Tool Name: LITV25-01 (NSCANCL05)
Infineon Inventory Number: 233540 / 234116
Data:
Feb. 2020:
The real measured Dynamic Distortion results were (Raw data):
Max X = 0.006
Max Y = 0.007
Min X= -0.064
Min Y = -0.009
In case you would apply ideal compensation values (Removed Scan Elements) the
achievable Dynamic Distortion could be
Max X = 0.008
Max Y = 0.009
Min X= -0.011
Min Y = -0.008
