| Configuration check sheet (MCS2) | |||||||
| Rev.23072501 | |||||||
| 1 | Check Date | 20240808 | Inspector | 이준우 | |||
| 2 | End User | GAGA TOSHIBA | |||||
| 3 | Machine Model | NSR-2005i10C | Serial Number | 1006003 | |||
| 4 | Electric source | (without/with) NEMA BOX / For (CVCF/UPS) / NEMA Switch(none/1/2) | |||||
| 5 | Chamber Type | Maker | ASAHI / SENDAI | Production date | 1994. 1 | ||
| S/N | S04 1107 | Model | S04 | ||||
| 6 | Chamber Size | 1950 | Chamber EPROM Ver. | ||||
| 7 | SET Temprature | Chamber : ℃ | LATC(LLTC): ℃ | IATC: ℃ | |||
| Reticle Microscope | Fixed ( )/ Variable ( 17.5 mm to 20 mm ) / setting size ( ) | ||||||
| 8 | Main Software version | Computer Type | PDP11(73/93) / NEST ( ) | ||||
| 9 | ROM Version | ST- | XY- | EP- | |||
| PA- | WF- | CE- | |||||
| WA- | LC- | RA- | |||||
| RL- | |||||||
| 10 | HP LASER | 5517A / 5517B / 5517C | LSA LASER | 5mW / 10mW | |||
| 11 | ITV Camera | Nikon Original Type / Nikon New Type / Custom eng. / Other ( ) | |||||
| 12 | Wafer Size | 2inch / 2.5inch / 3inch / 4inch / 6inch / 8inch | |||||
| 13 | Wafer Condition | Sapphire / Silicon / Other( ) | |||||
| 14 | OF Detection Type | Nikon Original Type / Omron type / Keyence type | |||||
| 15 | Wafer Loader Type | Type1 / Type2 (A1 / A3) | |||||
| 16 | Wafer Carrier Table | Left / Right / Extra | In-line | no / yes ( right/left ) | |||
| 17 | Reticle Size | 5inch(32mm / 26mm / 18mm) /6inch | FIA | no / yes | |||
| 18 | Reticle Library Slot | Main : ( 23 ) slot / Ext. LIB ( ) slot | |||||
| 19 | PPD /PD/ Extension LIB | PPD ( no/yes ) PD( no/yes ) Extension LIB( no/yes ) | |||||
| 20 | Rack Type | Normal (Right / Left) / Special | |||||
| 21 | NOTE | Monitor Missing | |||||
