| NSR2205i10C | 1-18 | 1-20 | 1-22 | 1-23 | |||
| STEPPING X | 0.04 | 0.036 | 0.045 | 0.027 | 0.054 | (μm) | |
| STEPPING Y | 0.033 | 0.036 | 0.039 | 0.027 | 0.033 | (μm) | |
| DISTORTION X | -0.023 | 0.005 | -0.064 | 0.079 | -0.079 | (μm) | |
| DISTORTIONY | -0.045 | -0.078 | 0.069 | 0.043 | -0.054 | (μm) | |
| INC（상면경사）X | 4.30 | -13.14 | (μrad) | ||||
| INC（상면경사）Y | 15.46 | 8.48 | (μrad) | ||||
| RETICLE ROTATION ave | -0.005 | -0.007 | 0.014 | -0.013 | 0.005 | (μm) | |
| RETICLE ROTATION rep | 0.001 | 0.011 | 0.013 | 0.009 | 0.003 | (μm) | |
| superposition FIA X | 0.049 | 0.029 | 0.074 | 0.043 | 0.089 | (μm) | |
| superposition FIA Y | 0.052 | 0.059 | 0.062 | 0.093 | 0.073 | (μm) | |
| superposition LSA X | 0.055 | 0.047 | 0.075 | 0.120 | 0.059 | (μm) | |
| superposition LSA Y | 0.029 | 0.086 | 0.097 | 0.068 | 0.067 | (μm) | |
| LAMP POWER | 621.85 | 472 | 564.61 | 462.1 | 660.74 | (mW/㎠) | |
| 均一性 균일성 | 2.15 | 4.44 | 2.84 | 5.73 | 2.07 | (%) | |
| 15mm | |||||||
| レチクルローテーション ave | 0.005 | (μm) | |||||
| レチクルローテーション rep | 0.015 | (μm) | |||||
| 重ね合わせ FIA X | 0.049 | (μm) | |||||
| 重ね合わせ FIA Y | 0.126 | (μm) | |||||
| 重ね合わせ LSA X | 0.068 | (μm) | |||||
| 重ね合わせ LSA Y | 0.061 | (μm) | |||||
| 1-10 | NSR2205i10C | 1006003 | 1995/1 | 6 | |||
| 1-18 | NSR2005i8A | 803234 | 1994/1 | 6 | |||
| 1-20 | NSR1755i7A | 94141 | 1992/1 | 6 | |||
| 1-22 | NSR1755i7A | 94092 | 1992/1 | 6 | |||
