KLA 2131 Mass and Wafer Inspection
Key Features & Specifications (KLA 2131):
•Manufacturer: KLA / KLA-Tencor
•Application: Automated Patterned Wafer/Mask Inspection
•Inspection Type: Brightfield (utilizes optical imaging for defect detection)
•Wafer Sizes: 6-inch (150mm) or 8-inch (200mm) models available
•Performance: Up to twice the speed of the KLA 2130, with higher sensitivity
•Defect Capabilities: Automatic defect classification (ADC) and high-resolution imaging for process control
•Vintage: Circa 1993–
Key Features & Specifications (KLA 2131):
•Manufacturer: KLA / KLA-Tencor
•Application: Automated Patterned Wafer/Mask Inspection
•Inspection Type: Brightfield (utilizes optical imaging for defect detection)
•Wafer Sizes: 6-inch (150mm) or 8-inch (200mm) models available
•Performance: Up to twice the speed of the KLA 2130, with higher sensitivity
•Defect Capabilities: Automatic defect classification (ADC) and high-resolution imaging for process control
•Vintage: Circa 1993–
